LAM Research Chamber for Alliance 9400 PTX
CHAMBER 9400 TCP 9600 Metal is a Polysilicon Dry Etcher LAM PTX Chamber SET Including GAS BOX
The LAM 9400SE is a high density plasma etch tool manufactured by LAM Research Corporation.
This tool was originally designed for production polysilicon etching, but has been reconfigured for
silicon based materials, III‐Vs, some metals, and organic materials. It uses a TCP
(transformer coupled plasma), which is a special patented form of an ICP source to
enhance plasma density. It also has a bias power supply for controlling ion bombardment energy.