Haake TCU Chiller Full Refurbishment From: ASML Photo Lithography Work Scope: 1. Replacement of copper tubing with leak 2. Overhauling of AC motor and Pump 3. Overhaul Compressor / Vacuum and purging 4. Refilling of Compressor gas and leak test 5. ABB and Danfloss Inverter repair and test 6. Communication PCB check and repair 7. Perform Functional Test (closed loop) with continuous running for at least 2 days. 8. Test Temp Set Point – 22 degrees Celsius 9. Pump Pressure 60 ~ 90 psi