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EPI - AMAT


Part Number : 0020-37321

Particle shield ring for rotation assy....


EPI - AMAT


Part Number : 0020-37026

Base Susceptor Lift Shaft (Teflon)....


EPI - AMAT


Part Number : 0020-37027

Space, Wafer Lift (Teflon)....


EPI - AMAT


Part Number : 1080-01152 ( 0090-05454 )

ASSY ROTATION MOTOR ....


EPI - AMAT


Part Number : 0020-36035

Magnet, Rotation Assy....